Microfabrication D
Aalto University
<p>Silicon and thin film materials. Unit processes in microfabrication: lithography, etching, deposition, oxidation, doping, polishing, bonding. Process integration of CMOS, MEMS and nanodevices. Cleanrooms, process equipment, yield and reliability. Lab demo.</p>
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Course dates
24 February 2026 - 29 May 2026
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Course organizer
Sami Franssila
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Place/Venue
School of Chemical Engineering / Department of Chemistry and Materials Science
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City
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Country
Finland
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Workload
5
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Link
https://mycourses.aalto.fi/course/search.php?...
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