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Design and Analysis of MEMS D


Aalto University


<p>Micro-electro-mechanical systems such as inertial sensors, piezoactuated ultrasonic transducers and resonating sensors, optical mirrors, fabry-perot interferometers and microfluidic systems. Physical operating principals, design of actuators and sensors and their characterization. Impact of manufacturing on performance and accuracy. Mechanics of thin film materials and membranes, residual stresses in multimaterial structures, principles of finite element modelling.</p>

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Course dates
01 September 2025 - 05 December 2025
Course organizer
Mervi Paulasto-Kröckel, Nikhilendu Tiwary, Glenn Ross
Place/Venue
School of Electrical Engineering / Department of Electrical Engineering and Automation
City
Country
Finland
Workload
5
Link
https://mycourses.aalto.fi/course/search.php?...